Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators by Evgeni GusevAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators by Evgeni Gusev

Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

EditorEvgeni Gusev, Eric Garfunkel, Arthur Dideikin

Paperback | June 30, 2010

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The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.
Title:Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and ActuatorsFormat:PaperbackDimensions:326 pagesPublished:June 30, 2010Publisher:Springer NetherlandsLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:904813806X

ISBN - 13:9789048138067

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Table of Contents

Preface. MEMS/NEMS Technologies And Applications. History of Early Research on MEMS in Russia (U.S.S.R.); V. Vaganov.- Challenges of Complete CMOS/MEMS Systems Integration; V. Vaganov.- MEMS for Practical Applications; M. Esashi.- Nanochip: A MEMS-Based Ultra-High Data Density Memory Service; N. Belov et al.- Low Cost Silicon Coriolis' Gyroscope Paves the way to Consumer IMU; B. Vigna et al.- Microwave and Millimetre Wave Devices Based on Micromachining of Ill-V Semiconductors; A. Müller et al.- Monocrystalline-Silicon Microwave MEMS Devices Multi-Stable Switches, W-Band Phase Shifters, and MEMS Tuneable Frequency-Selective Surfaces; J. Oberhammer et al.- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites; V.G. Golubev.- MEMS Device And Reliability Physics. Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams; S.Krylov, N. Dick.- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS; P.G. Steeneken, J. Stulemeijer.- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches; G. Papaioannou.- Advanced Processes And Materials. Development of DRIE for the Next Generation of MEMS Devices; H. Ashraf et al.- Low-Temperature Processes for MEMS Device Fabrication; J. Kiihamäki et al.- High Temperature Stable Au/Sn and Cu/Sn Interconnects for 3D Stacked Applications; N. Hoivik et al.- 3D integration of MEMS and IC: Design, Technology and Simulations; M.M.V. Taklo et al.- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices; G. Liu et al.- Modeling of Dry Etching in Production of MEMS; A. Rusakov et al.- XRD and Raman Study of Low Temperature AlGaAs/GaAs(100) Heterostructures; P. V. Seredin et al.- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys; 0. Adiguzel.- Sensors. Smart Sensors: Advantages and Pitfalls; P.J. French.-Vertically Integrated MEMS SOl Composite Porous Silicon-Crystalline Silicon Cantilever-Array - Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents; S. Stolyarova et al.- Integration of Diverse Biological Materials in Micro/Nano Devices; R. Ghodssi et al.-Force Sensing Optimization and Applications; J . C. Doll et al.- Using Parametric Resonance to Improve Micro Gyroscope Robustness; L. Oropeza-Ramos et al.- Subject Index. Authors Index.