Advanced Technologies Based on Wave and Beam Generated Plasmas by H. SchlüterAdvanced Technologies Based on Wave and Beam Generated Plasmas by H. Schlüter

Advanced Technologies Based on Wave and Beam Generated Plasmas

EditorH. Schlüter, A. Shivarova

Paperback | December 4, 2010

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This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas
Title:Advanced Technologies Based on Wave and Beam Generated PlasmasFormat:PaperbackDimensions:582 pagesPublished:December 4, 2010Publisher:Springer NetherlandsLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:9048151910

ISBN - 13:9789048151912

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Table of Contents

Preface.Part 1: Lectures. 1.1. Gas Discharges: Applications. Plasma Discharges for Materials Processing and Display Applications; M.A. Lieberman. The Development and Use of Surface - Wave Sustained Discharges for Applications; M. Moisan, et al. Electrodeless Gas Discharges for Lighting; G.G. Lister. Plasma Production above Multipolar Magnetic Field Structures: from D.C. Magnetrons to Distributed ECR; J. Pelletier, et al. ECR Plasmas for Thin-Film Deposition; R. Wilhelm. Deposition Properties and Applications of Carbon-Based Coatings; R. Wilhelm. Substrate Biasing during Plasma Processing: Interest, Methods and Limitations; J. Pelletier. Ion Energy Distributions; G.W.M. Kroesen, et al. Dusty Plasmas: Fundamental Aspects and Industrial Applications; G.W.M. Kroesen, et al. 1.2. Ion Implantation. Plasma Based Ion Implantation; W. Möller. 1.3. Wave Generated Plasmas. Waveguide Stationary and Nonstationary Discharges: Modelling and Experiments; D. Grozev, et al. Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Discharges; H. Schlüter. Travelling Wave Discharges in Nitrogen: Modelling and Experiment; C.M. Ferreira, et al. Atmospheric Pressure Discharges: Travelling Wave Plasma Sources; Z. Zakrzewski, M. Moisan. Modelling of Atmospheric Pressure Microwave Sustained Discharges; Z. Zakrzewski, et al. Long Microwave Discharges; Z. Zakrzewski, M. Moisan. Waves in Bounded Magnetized Plasmas; S.T. Ivanov. 1.4. Beam Generated Plasmas. Electron Beam Generated Plasmas: Theory Experiments, Applications; M.V. Kuzelev. EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atoms; G. Fußmann, et al. Part 2: Posters. Author Index. Subject Index.