Ceramic Thick Films For Mems And Microdevices by Robert A. Dorey

Ceramic Thick Films For Mems And Microdevices

byRobert A. Dorey

Paperback | August 19, 2016

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about

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within theMicro & Nano Technologies Series , this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc.



  • Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups
  • Written by a single author, this book provides a clear, coherently written guide to this important emerging technology
  • Covers materials, fabrication and applications in one book

About The Author

Dr. Robert Dorey is a Royal Academy of Engineering/EPSRC Research Fellow, Senior Lecturer in Micro a

Details & Specs

Title:Ceramic Thick Films For Mems And MicrodevicesFormat:PaperbackDimensions:192 pages, 8.75 × 6.35 × 0.68 inPublished:August 19, 2016Publisher:William Andrew PublishingLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0128103574

ISBN - 13:9780128103579

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Extra Content

Table of Contents

Integration and applications

Routes to thick films

Thick film deposition techniques

Microstructure-property relationships

Pattering and structuring

Houston, we have a problem: Thick film troubleshooting

Recipes and techniques