Chemical Mechanical Polishing in Silicon Processing

Other | October 1, 1999

byWillardson, R. K., R. K. Willardson

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Since its inception in 1966, the series of numbered volumes known asSemiconductors and Semimetalshas distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such asHydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon,and others promise that this tradition will be maintained and even expanded.
Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes inSemiconductors and Semimetalshave been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.

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Since its inception in 1966, the series of numbered volumes known asSemiconductors and Semimetalshas distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did ...

Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the Uni...

other books by Willardson, R. K.

Semiconductors and Semimetals
Semiconductors and Semimetals

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Semiconductors and Semimetals
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see all books by Willardson, R. K.
Format:OtherDimensions:307 pages, 1 × 1 × 1 inPublished:October 1, 1999Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0080864619

ISBN - 13:9780080864617

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