CMOS Hotplate Chemical Microsensors by Markus GrafCMOS Hotplate Chemical Microsensors by Markus Graf

CMOS Hotplate Chemical Microsensors

byMarkus Graf, Diego Barrettino, Henry P. Baltes

Hardcover | April 3, 2007

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The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

Markus Graf: Degree in Physics: 1992-1999 University of Konstanz, Germany, Exchange year at the University Joseph-Fourier, Grenoble, France, Research Assistant: 1999 Microelectronic Center MIC, Lyngby, Denmark, PhD:1999-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since...
Title:CMOS Hotplate Chemical MicrosensorsFormat:HardcoverDimensions:125 pagesPublished:April 3, 2007Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3540695613

ISBN - 13:9783540695615


Table of Contents

Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.