Confocal Scanning Optical Microscopy And Related Imaging Systems: CONFOCAL SCANNING OPTICAL MICR

Hardcover | August 29, 1996

byGordon S. Kino, Timothy R. CorleEditorGordon S. Kino

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This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope CSOM , and the Optical Interference Microscope OIM . A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope NSOM is also given. The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes. Key Features* Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers* Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology* Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations* Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications* Discusses the theory and design of near-field optical microscopes* Explains phase imaging in the scanning optical and interference microscopes

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From Our Editors

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers.

From the Publisher

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope CSOM , and the Optical Interference Microscope OIM . A comprehensive discussion of the theory and design of the Near-Field Sc...

From the Jacket

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. These microscopes have been designed to overcome the problems associated with submicrometer imaging of complex three-dimensional structures. The book concentrates mainly on two of these instruments: the confocal sca...

Format:HardcoverDimensions:335 pages, 9 × 6 × 0.98 inPublished:August 29, 1996Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0124087507

ISBN - 13:9780124087507

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Table of Contents

Introduction. Instruments. Depth and Transverse Resolution. Phase Imaging. Applications. Appendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM.

From Our Editors

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers.