Electrochemical Micromachining For Nanofabrication, Mems And Nanotechnology by Bijoy BhattacharyyaElectrochemical Micromachining For Nanofabrication, Mems And Nanotechnology by Bijoy Bhattacharyya

Electrochemical Micromachining For Nanofabrication, Mems And Nanotechnology

byBijoy BhattacharyyaEditorBijoy Bhattacharyya

Hardcover | April 17, 2015

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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnologyis the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.

  • Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications
  • Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM
  • Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
Professor, Production Engineering Department, Jadavpur University, Kolkata, IndiaField of Specialization: Non-Traditional Machining Processes, Micro Machining.Advanced Manufacturing Technology (AMT), Production Management.Principal Investigator since 1995 for seven multi-year research projects e.g. on Electrochemical Machining (ECM), E...
Title:Electrochemical Micromachining For Nanofabrication, Mems And NanotechnologyFormat:HardcoverDimensions:296 pages, 9.41 × 7.24 × 0.98 inPublished:April 17, 2015Publisher:William Andrew PublishingLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0323327370

ISBN - 13:9780323327374


Table of Contents

1. Introduction

2. Electrochemical Machining: Macro to Micro

3. Principle of Material Removal in EMM

4. Types of EMM

5. Electrochemical Micromachining (EMM) Setup

6. Design and Development of Micro Tools

7. Influencing Factors of EMM

8. Improvement of Machining Accuracy

9. Advantages, Applications and Limitations of EMM

10. Micro-Features Fabrication for MEMS and Other Microengineering Applications

11. Electrochemical Micro System Technology (EMST)

12. Recent Advancements in EMM for Nanofabrication

13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications