Electron Beam Testing Technology

Hardcover

EditorJohn T.L. Thong

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This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

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This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.

Format:HardcoverDimensions:478 pages, 10 × 7.01 × 0.1 inPublisher:Springer US

The following ISBNs are associated with this title:

ISBN - 10:0306443600

ISBN - 13:9780306443602

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Table of Contents

Background to Electron Beam Testing; W.C. Nixon. Introduction; J.T.L. Thong. Principles and Applications; J.T.L. Thong. Essential Electron Optics; A.R. Dinnis. Electron Beam Interaction with Specimen; K. Ura. Electron Spectrometers and Voltage Measurements; L. Dubbeldam. High Speed Techniques; J.T.L. Thong. Picosecond Photoemission Probing; H. Beha, R. Clauberg. Signal and Image Processing; F.M. Boland, E.R. Lynch. System Integration; M. Battù, et al. Practical Considerations in Electron Beam Testing; T.J. Aton. Industrial Case Studies; D.W. Ranasinghe, et al. Index.