Fabrication and Design of Resonant Microdevices by Behraad BahreyniFabrication and Design of Resonant Microdevices by Behraad Bahreyni

Fabrication and Design of Resonant Microdevices

byBehraad Bahreyni, Behraad Bahreyni

Other | October 20, 2008

Pricing and Purchase Info

$167.99 online 
$210.00 list price save 20%
Earn 840 plum® points

Prices and offers may vary in store


In stock online

Ships free on orders over $25

Not available in stores


This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

  • Offers numerous academic and industrial examples of resonant MEMS
  • Provides an analytic model of device behaviour
  • Explains two-port systems in detail
  • Devotes ample space to excitation and signal detection methods
  • Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Title:Fabrication and Design of Resonant MicrodevicesFormat:OtherDimensions:250 pages, 1 × 1 × 1 inPublished:October 20, 2008Publisher:Elsevier ScienceLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0815519710

ISBN - 13:9780815519713


Table of Contents

Microfabrication Actuation mechanisms Sensing techniques Modeling Damping mechanisms Interfacing Noise Packaging Survey of applications