Fabrication and Design of Resonant Microdevices by Behraad BahreyniFabrication and Design of Resonant Microdevices by Behraad Bahreyni

Fabrication and Design of Resonant Microdevices

byBehraad Bahreyni, Behraad Bahreyni

Other | October 20, 2008

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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

  • Offers numerous academic and industrial examples of resonant MEMS
  • Provides an analytic model of device behaviour
  • Explains two-port systems in detail
  • Devotes ample space to excitation and signal detection methods
  • Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Title:Fabrication and Design of Resonant MicrodevicesFormat:OtherDimensions:250 pages, 1 × 1 × 1 inPublished:October 20, 2008Publisher:Elsevier ScienceLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0815519710

ISBN - 13:9780815519713

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Table of Contents

Microfabrication Actuation mechanisms Sensing techniques Modeling Damping mechanisms Interfacing Noise Packaging Survey of applications