Handbook of Vacuum Science and Technology

Other | October 1, 1997

byHoffman, Dorothy, Dorothy Hoffman

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TheHandbook of Vacuum Technologyconsists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.

  • User oriented with many useful tables, charts, and figures of use to the practitioner
  • Reviews new vacuum materials and equipment
  • Illustrates the design and maintenance of modern vacuum systems
  • Includes well referenced chapters

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From the Publisher

TheHandbook of Vacuum Technologyconsists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known ex...

Format:OtherDimensions:835 pages, 1 × 1 × 1 inPublished:October 1, 1997Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0080533752

ISBN - 13:9780080533759

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Table of Contents

Fundamentals of Vacuum Technology and Surface Physics
B. Singh and J.H. Thomas, III
Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science
Creation of Vacuum
M. Hablanian
The Technology of Vacuum Pumps--An Overview.F.J. Eckle,Diaphragm Pumps.J. Richman,Blowers. Vapor Jet Pumps:M. Hablanian,Diffusion Pumps.G. Ash,Cryogenic Pumps.H. Henning,Turbomolecular Pumps.J. Singleton,UHV Pumps
Vacuum Measurements
H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr.,
Measurements of Pressure.L. Lieszkovszky,Mass Analysis and Partial Pressure Measurement.R. Outlaw,Analysis of Partial Pressure Information.L. Hinkle,Gas Flow Measurements
Systems Design and Components
Components for Vacuum Equipment and Systems:
N.T. Peacock
Valves.N.T. Peacock,Flanges.W. Helgeland,Feedthroughs.C. Kraft,Ports.J. Panitz,Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials.R.N. Peacock,Seal Materials and Design.B. Dayton,Outgassing of Materials.J. Garner,Aluminum Based Vacuum Systems.D. Mattox,Preparation and Cleaning of Vacuum Surfaces
Vacuum Applications
High Vacuum Based Processes:S. Rossnagel,Sputtering.V. Patel,Plasma Etching.M. Powers,Ion Beam Based Processes.J. Cheung,Laser Ablation.F. Jansen,CVD and PECVD.J. Thomas,UHV Based Processes
Large-Scale Vacuum Based Processes
W. Robbins,Large Area Coatings.H.F. Dylla,The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.