Inertial Microsensors

Hardcover | September 4, 2020

byAndrei Shkel

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This excellent volume lays out methods for the analysis and design of inertial micromachined sensors. The aim of the book is to provide readers with a solid foundation in the theory of inertial measurement, introduce them to design fundamentals, and provide them with design recipes for implementation of inertial instruments on the micro-scale. All of the discussions in the book are supported by constructive computational examples illustrating the material.

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This excellent volume lays out methods for the analysis and design of inertial micromachined sensors. The aim of the book is to provide readers with a solid foundation in the theory of inertial measurement, introduce them to design fundamentals, and provide them with design recipes for implementation of inertial instruments on the micr...

Format:HardcoverDimensions:400 pages, 9.25 × 6.1 × 0 inPublished:September 4, 2020Publisher:Springer USLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0387355405

ISBN - 13:9780387355405

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Table of Contents

Theory of Inertial Measurement.- Devices for Inertial Measurement.- Design Fundamentals.- Accelerometers.- Gyroscopes.- Sources of Errors in Inertial Sensors.-Fabrication Techniques for Inertial Sensors.- Advanced Topics in Inertial Sensors Development.- Packaging of Inertial Sensors.