Introduction to Microsystem Design

August 3, 2013|
Introduction to Microsystem Design by Werner Karl Schomburg
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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was wor...
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Title:Introduction to Microsystem Design
Format:Paperback
Product dimensions:322 pages, 9.25 X 6.1 X 0 in
Shipping dimensions:322 pages, 9.25 X 6.1 X 0 in
Published:August 3, 2013
Publisher:Springer-Verlag/Sci-Tech/Trade
Language:English
Appropriate for ages:All ages
ISBN - 13:9783642268526

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