Introduction to VLSI Process Engineering by Y. NakaIntroduction to VLSI Process Engineering by Y. Naka

Introduction to VLSI Process Engineering

byY. NakaEditorK. Sugawara, C. Mcgreavy

Paperback | October 21, 2012

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Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
Title:Introduction to VLSI Process EngineeringFormat:PaperbackDimensions:210 pagesPublished:October 21, 2012Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:9401046824

ISBN - 13:9789401046824

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Table of Contents

Preface to the English language edition. Coming age of VLSI elements. Semiconductor market. Evolution of semiconductors. Characteristics of VLSI. VLSI process engineering operations. Packaging and process monitoring technology. Production of silicon wafers and environmental. Process engineering aspects of VLSI production. References. Appendices. Index.