Ion Implantation Science and Technology

Kobo ebook | December 1, 2012

byZiegler, J.F.

not yet rated|write a review
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation.
The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation.
The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

Pricing and Purchase Info

$73.79 online
$95.73 list price (save 22%)
Available for download
Not available in stores

From the Publisher

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of en...

Format:Kobo ebookPublished:December 1, 2012Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0323144012

ISBN - 13:9780323144018

Look for similar items by category:

Customer Reviews of Ion Implantation Science and Technology

Reviews