MEMS Materials and Processes Handbook by Reza Ghodssi

MEMS Materials and Processes Handbook

byReza Ghodssi, Pinyen Lin

Kobo ebook | March 18, 2011

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Title:MEMS Materials and Processes HandbookFormat:Kobo ebookPublished:March 18, 2011Publisher:Springer USLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0387473181

ISBN - 13:9780387473185