Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3…

Hardcover | September 6, 2006

EditorCornelius T. Leondes

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

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From the Publisher

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It als...

From the Jacket

Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compat...

Format:HardcoverDimensions:2188 pages, 9.25 × 6.1 × 0.39 inPublished:September 6, 2006Publisher:Springer USLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0387245200

ISBN - 13:9780387245201

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Extra Content

Table of Contents

Volume 1.- Design Methods in MEMS/NEMS.- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS).- Manufacturing Advisory Service Systems for Concurrent and Collaborative Design of MEMS Devices.- Web-Enabled Knowledge - Intensive Support Framework for Collaborative Design of MEMS.- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and their Application.- Techniques in Global Optimal Design for MEMS and their Applications.- Theory and Design of Micromechanical Vibratory Gyroscopes.- A Hierarchical Design Platform for Microelectrofluidic Systems.- Techniques in Electrostatics Analysis of MEMS and their Applications.- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS SystemsVolume 2.- Fabrication Techniques for MEMS/NEMS.- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications.- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications.- GaAs Thermally Based MEMS Devices - Fabrication Techniques, Characterization and Modeling.- Novel MEMS Fluidic Integrated Circuit Technology with 'MOSFET-Like Microvalve Elements'.- Hydrogel-based µTAS in Microfluidic Devices and their Applications.- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication.- Techniques and Applications of Capactive Micromachined Ultrasonic TransducersVolume 3.-  Manufacturing Methods in MEMS/NEMS.- Techniques in the Development of Micromachine Tool Prototypes and their Applications in Microfactories.- Tool-based Micro Machining and Applications in MEMS.- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application.- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices.- Injection Molding Techniques for the Fabrication of MEMS Elements.- Excimer Laser Machined Three-Dimensional Microstructures-Techniques and Application.- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems.- Production Scheduling in MEMS ManufacturingVolume 4.- Sensors and Actuators in MEMS/NEMS.- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives.- Micromachined Thermal Accelerometer without Proof Mass.- Techniques in MEMS Devices for Micro Humidity Sensors and their Applications.- Modeling the Electromechanical Response of Electrostatic Actuators.- Micropump Systems Techniques and Applications in MEMS.- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators.- Techniques in the Design of Thermomechanical Microactuators.- Techniques in MEMS Microthermal Actuators and their Applications.- Techniques in Residual Stress Measurement for MEMS and their Applications Volume 5.- Medical Applications  of MEMS/NEMS and MOEMS (Micro Optical Electro Mechanical Systems).- Techniques in Sonophoresis Biomedical Devices and their Applications.- MEMS Application of Actuators and Sensors for Glaucoma Treatment.- Single-crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications.- Techniques in the Development of Endovascular Microtools and their Applications.- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems.- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors.- Magnetic Microactuators - Techniques and Applications.- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and their Applications.- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications .- Three-Dimensional Techniques for FEM Simulations in Laser Modules and their Applications.

Editorial Reviews

From the Foreword:The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS.... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS.... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future.Xuan F ZhaNational Institute of Standards and TechnologyGaithersburg, Maryland, USAJuly 30, 2005