MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness by Cenk AcarMEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness by Cenk Acar

MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

byCenk Acar, Andrei Shkel

Hardcover | October 23, 2008

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Title:MEMS Vibratory Gyroscopes: Structural Approaches to Improve RobustnessFormat:HardcoverDimensions:260 pagesPublished:October 23, 2008Publisher:Springer-Verlag/Sci-Tech/Trade

The following ISBNs are associated with this title:

ISBN - 10:0387095357

ISBN - 13:9780387095356

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Table of Contents

Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.

Editorial Reviews

From the reviews:

"This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. . The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers." (Benu Chatterjee, Materials World, March, 2011)