Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

byXiao-Sheng Zhang

Hardcover | December 8, 2015

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting by Xiao-Sheng Zhang
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This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Introduction.- Micro/nano Integrated Fabrication Technique for Silicon.- Micro/Nano Integrated Fabrication Technique for Flexible Materials.- Flexible Triboelectric Nanogenerators: Principle and Fabrication.- Flexible Triboelectric Nanogenerators: Enhancement and Applications.- Summary and Perspectives.
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Title:Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy HarvestingFormat:HardcoverDimensions:122 pages, 23.5 X 15.5 X 0.03 inPublished:December 8, 2015Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3662488140

ISBN - 13:9783662488140

Appropriate for ages: All ages

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