Microfabrication For Industrial Applications by Regina LuttgeMicrofabrication For Industrial Applications by Regina Luttge

Microfabrication For Industrial Applications

byRegina Luttge

Paperback | January 17, 2017

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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.

Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.

Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.



  • Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
  • Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
  • Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
  • Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
  • Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Luttge studied Applied Sciences in Germany (1989-1993). She had been working as an engineering researcher at Institut für Mikrotechnik in Mainz, Germany, for nearly 5 years prior to starting her PhD studies in Microsystems Technologies at Imperial College in 1999, London, UK. In 2003, Luttge was awarded a PhD from University of London ...
Title:Microfabrication For Industrial ApplicationsFormat:PaperbackDimensions:312 pages, 8.75 × 6.35 × 0.68 inPublished:January 17, 2017Publisher:William Andrew PublishingLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0128103671

ISBN - 13:9780128103678

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Table of Contents

Microsystems technology
Nanotechnology
Microsystems for Information Technology
Micro and nanomechanical sensors and actuators
Sensors for chemical and medical applications
Microfluidic systems
Micro and nanotechnology for sustainable energy