Microfabrication For Industrial Applications by Regina Luttge

Microfabrication For Industrial Applications

byRegina Luttge

Paperback | January 17, 2017

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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; waveguide, plastic, semiconductor material processing; packaging; interconnects; stress e.g., thin film residual ; economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials incl. functional polymers , methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers and students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing and their health aspects , nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- and nanostructures machines, materials, costs Explains applications of Microsystems for information technology, e.g.: data recording camera, microphone , storage memories, CDs , communication; computing; and displays beamers, LCD, TFT Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps and valves, inkjets, DNA-analysis, lab-on-a-chip, and micro-cooling

About The Author

Luttge studied Applied Sciences in Germany (1989-1993). She had been working as an engineering researcher at Institut für Mikrotechnik in Mainz, Germany, for nearly 5 years prior to starting her PhD studies in Microsystems Technologies at Imperial College in 1999, London, UK. In 2003, Luttge was awarded a PhD from University of London ...
Nano- And Microfabrication For Industrial And Biomedical Applications
Nano- And Microfabrication For Industrial And Biomedical Applications

by Regina Luttge


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Details & Specs

Title:Microfabrication For Industrial ApplicationsFormat:PaperbackDimensions:312 pages, 8.75 × 6.35 × 0.68 inPublished:January 17, 2017Publisher:William Andrew PublishingLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0128103671

ISBN - 13:9780128103678

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Extra Content

Table of Contents

Microsystems technology
Microsystems for Information Technology
Micro and nanomechanical sensors and actuators
Sensors for chemical and medical applications
Microfluidic systems
Micro and nanotechnology for sustainable energy