Microstereolithography and other Fabrication Techniques for 3D MEMS

March 30, 2001|
Microstereolithography and other Fabrication Techniques for 3D MEMS by Vijay K. Varadan
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This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS.

This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields.

It provides:
* A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
* Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units
* Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding
* Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers
This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to pub...
Title:Microstereolithography and other Fabrication Techniques for 3D MEMSFormat:HardcoverProduct dimensions:274 pages, 9.13 X 6.3 X 0.84 inShipping dimensions:274 pages, 9.13 X 6.3 X 0.84 inPublished:March 30, 2001Publisher:WileyLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:047152185X

ISBN - 13:9780471521853

Appropriate for ages: All ages

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