Microsystem Technology and Microrobotics: MICROSYSTEMS TECHNOLOGY & MICR by Sergej FatikowMicrosystem Technology and Microrobotics: MICROSYSTEMS TECHNOLOGY & MICR by Sergej Fatikow

Microsystem Technology and Microrobotics: MICROSYSTEMS TECHNOLOGY & MICR

bySergej Fatikow, Ulrich Rembold

Hardcover | October 22, 1991

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Title:Microsystem Technology and Microrobotics: MICROSYSTEMS TECHNOLOGY & MICRFormat:HardcoverDimensions:408 pagesPublished:October 22, 1991Publisher:Springer-Verlag/Sci-Tech/Trade

The following ISBNs are associated with this title:

ISBN - 10:3540606580

ISBN - 13:9783540606581

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Table of Contents

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.