Microwave Discharges: Fundamentals and Applications

Hardcover | March 31, 1993

EditorCarlos M. Ferreira, Michel Moisan

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The proceedings of a NATO Advanced Research Workshop on [title], held in Vimeiro, Portugal, May 1992. Most of the contributors are well- known scientists in the field of microwave discharge sources, modeling, diagnostics, and applications. The volume provides an up-to- date review of this field which should appeal to both basic scientists and those using these systems in applications such as surface treatment and elemental analysis. Annotation c. by Book News, Inc., Portland, Or.

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The proceedings of a NATO Advanced Research Workshop on [title], held in Vimeiro, Portugal, May 1992. Most of the contributors are well- known scientists in the field of microwave discharge sources, modeling, diagnostics, and applications. The volume provides an up-to- date review of this field which should appeal to both basic scienti...

Format:HardcoverDimensions:573 pages, 10 × 7.01 × 0.27 inPublished:March 31, 1993Publisher:Springer US

The following ISBNs are associated with this title:

ISBN - 10:0306443554

ISBN - 13:9780306443558

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Table of Contents

Surface Wave Discharges: Waves Propagation in Bounded Plasmas; C. Boisse-Laporte. Strongly Damped Surface Waves in Plasmas; G. Lister. Microwave Plasma Sources: Surface Wave Plasma Sources; Z. Zakrzewski, et al. ECR Plasma Sources; R. Wilhelm. Diagnostics: Optical Diagnostic for High Electron Density Plasmas; M. van de Sanden. Use of Emissive Probes in HF Plasmas; F.M. Dias. Modeling: Kinetic Modeling of Microwave Discharges; C.M. Ferreira. Time-Dependent EEDFs in Molecular Gases; M. Capitelli; et al. Light Sources: Applications of Microwave Discharges to High Power Light Sources; J. Waymouth. Applications: Semiconductor Processing Applications of Microwave Plasmas; J. Paraszczak, J. Heidenreich. Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas; M. Wertheimer, L. Martinu. 24 additional articles. Index.