Microwave Discharges: Fundamentals and Applications by Carlos M. FerreiraMicrowave Discharges: Fundamentals and Applications by Carlos M. Ferreira

Microwave Discharges: Fundamentals and Applications

byCarlos M. FerreiraEditorMichel Moisan

Hardcover | March 31, 1993

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Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
Title:Microwave Discharges: Fundamentals and ApplicationsFormat:HardcoverDimensions:564 pagesPublished:March 31, 1993Publisher:Kluwer Boston Inc.

The following ISBNs are associated with this title:

ISBN - 10:0306443554

ISBN - 13:9780306443558

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Table of Contents

Surface Wave Discharges: Waves Propagation in Bounded Plasmas; C. Boisse-Laporte. Strongly Damped Surface Waves in Plasmas; G. Lister. Microwave Plasma Sources: Surface Wave Plasma Sources; Z. Zakrzewski, et al. ECR Plasma Sources; R. Wilhelm. Diagnostics: Optical Diagnostic for High Electron Density Plasmas; M. van de Sanden. Use of Emissive Probes in HF Plasmas; F.M. Dias. Modeling: Kinetic Modeling of Microwave Discharges; C.M. Ferreira. Time-Dependent EEDFs in Molecular Gases; M. Capitelli; et al. Light Sources: Applications of Microwave Discharges to High Power Light Sources; J. Waymouth. Applications: Semiconductor Processing Applications of Microwave Plasmas; J. Paraszczak, J. Heidenreich. Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas; M. Wertheimer, L. Martinu. 24 additional articles. Index.