Multilayer Integrated Film Bulk Acoustic Resonators by Yafei ZhangMultilayer Integrated Film Bulk Acoustic Resonators by Yafei Zhang

Multilayer Integrated Film Bulk Acoustic Resonators

byYafei Zhang, Da Chen

Hardcover | August 28, 2012

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Mulilayer Integrated Film Bulk Acoustic Resonatorsmainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.

Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.

Prof. Yafei Zhang is the director of the Ministry of Education''s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang''s research group.

Prof. Yafei Zhang is the director of the Ministry of Education''s Key Laboratory for Thin Films and Microfabrication Technology. He received his PhD in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and process...
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Title:Multilayer Integrated Film Bulk Acoustic ResonatorsFormat:HardcoverDimensions:154 pages, 23.5 X 15.5 X 0 inPublished:August 28, 2012Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3642317758

ISBN - 13:9783642317750

Appropriate for ages: All ages

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Table of Contents

Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of AlN Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.