Multilayer Integrated Film Bulk Acoustic Resonators by Yafei Zhang

Multilayer Integrated Film Bulk Acoustic Resonators

byYafei Zhang, Da Chen

Kobo ebook | August 28, 2012

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Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.

Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.

Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Title:Multilayer Integrated Film Bulk Acoustic ResonatorsFormat:Kobo ebookPublished:August 28, 2012Publisher:Springer Berlin HeidelbergLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3642317766

ISBN - 13:9783642317767

Appropriate for ages: All ages

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