Nanopositioning Technologies: Fundamentals And Applications

March 30, 2018|
Nanopositioning Technologies: Fundamentals And Applications by Changhai Ru
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Title:Nanopositioning Technologies: Fundamentals And Applications
Format:Paperback
Product dimensions:409 pages, 9.25 X 6.1 X 0 in
Shipping dimensions:409 pages, 9.25 X 6.1 X 0 in
Published:March 30, 2018
Publisher:Springer Nature
Language:English
Appropriate for ages:All ages
ISBN - 13:9783319795393

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