Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine products

Hardcover | April 30, 1999

EditorNorio TaniguchibyTsuguo Kohno, Kazuo Maruyama

not yet rated|write a review
The manufacture of integrated circuits and opto- electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leadingresearchers in Japan, that is the world leaders. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer) = 0.001 m. Since the distance between lattice atoms is about 0.3 nm this constitutes the limit inresolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. This means that the accuracy and resolution of the positioning and measuring apparatus used in atomic bit processing must at least be on the order of sub-nm. Nanotechnology is thus concerned with integrated processing systems with measurement, position control, and processing technologies in thesub-nm range. This is essential in the fabrication of extremely precise and fine parts. fabrication of extremely precise and fine parts.

Pricing and Purchase Info

$517.57 online
$697.50 list price (save 25%)
Ships within 1-3 weeks
Ships free on orders over $25

From the Publisher

The manufacture of integrated circuits and opto- electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leadingresearchers in Japan, that is the world leaders....

Norio Taniguchi is at Tokyo Science University. Tsuguo Kohno is at Tokyo Metropolitan Institute of Science and Technology. Maruyama is at Tokyo Institute of Technology.
Format:HardcoverDimensions:422 pages, 9.69 × 7.44 × 1.06 inPublished:April 30, 1999Publisher:Oxford University Press

The following ISBNs are associated with this title:

ISBN - 10:0198562837

ISBN - 13:9780198562832

Look for similar items by category:

Customer Reviews of Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine products

Reviews

Extra Content

Table of Contents

Part 1: Fundamentals of nanotechnology1. N. Taniguchi: Nano-machinery2. T. Kohno: Measuring systems3. K. Maruyama: Positioning systemsPart 2: Applications of nanotechnology4. K. Iizuka: Nano-grating or 1D scaling systems5. K. Iizuka: Nano-lithography or 2D patterning systems6. I. Miyamoto: Nano-forming or 3D shaping systems and surface finishing systems7. T. Dohi: Fabrication systems for nano-assembliesPart 3: Future trends in nanotechnology8. N. Taniguchi: Development of nano products and systemization of nanotechnology