Organometallic Vapor-phase Epitaxy: Theory And Practice

Other | March 1, 1999

byStringfellow, Gerald B., Gerald B. Stringfellow

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This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.
  • Updated with new emphasis on the semiconducting nitride materials-GaN and its alloys with In and Al
  • Emphasizes the newly understood aspects of surface processes
  • Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics

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This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description o...

Stringfellow was among the pioneers of the organometallic vapor phase epitaxial (OMVPE) growth technique, beginning his work in this area in 1975. He has published over 150 papers on this subject and delivered 30 invited papers at national and international conferences during the last 5 years. This work emphasizes the materials science...

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Format:OtherDimensions:572 pages, 1 × 1 × 1 inPublished:March 1, 1999Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0080538185

ISBN - 13:9780080538181

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Table of Contents

Overview of the OMVPE Process. Thermodynamics. Physical Processes Occurring on the Surface. Source Molecules. Kinetics. Hydrodynamics and Mass Transport. Design of the OMVPE Process. Specific Materials. Superlattice Structures. Devices.