Physical Principles of Electron Microscopy: An Introduction to TEM, SEM, and AEM

Hardcover | August 3, 2005

byR.F. Egerton

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Scanning and stationary-beam electron microscopes have become an indispensable tool for both research and routine evaluation in materials science, the semiconductor industry, nanotechnology, and the biological and medical sciences. Physical Principles of Electron Microscopy provides an introduction to the theory and current practice of electron microscopy for undergraduate students who want to acquire an appreciation of how basic principles of physics are utilized in an important area of applied science, and for graduate students and technologists who make use of electron microscopes. At the same time, this book will be equally valuable for university teachers and researchers who need a concise supplemental text that deals with the basic principles of microscopy.

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Scanning and stationary-beam electron microscopes have become an indispensable tool for both research and routine evaluation in materials science, the semiconductor industry, nanotechnology, and the biological and medical sciences. Physical Principles of Electron Microscopy provides an introduction to the theory and current practice of...

From the Jacket

Scanning and stationary-beam electron microscopes have become an indispensable tool for both research and routine evaluation in materials science, the semiconductor industry, nanotechnology, and the biological and medical sciences. Physical Principles of Electron Microscopy provides an introduction to the theory and current practice of...

Format:HardcoverDimensions:214 pages, 9.25 × 6.1 × 0.04 inPublished:August 3, 2005Publisher:SpringerLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0387258000

ISBN - 13:9780387258003

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Table of Contents

Dedication Preface x1. An Introduction to Microscopy 11.1 Limitations of the Human Eye 11.2 The Light-Optical Microscope 51.3 The X-ray Microscope 91.4 The Transmission Electron Microscope 111.5 The Scanning Electron Microscope 171.6 Scanning Transmission Electron Microscope 191.7 Analytical Electron Microscopy 211.8 Scanning-Probe Microscopes 212. Electron Optics 272.1 Properties of an Ideal Image 272.2 Imaging in Light Optics 302.3 Imaging with Electrons 342.4 Focusing Properties of a Thin Magnetic Lens 412.5 Comparison of Magnetic and Electrostatic Lenses 432.6 Defects of Electron Lenses 443. The Transmission Electron Microscope 573.1 The Electron Gun 583.2 Electron Acceleration 663.3 Condenser-Lens System 703.4 The Specimen Stage 753.5 TEM Imaging System 783.6 Vacuum System 884. TEM Specimens and Images 934.1 Kinematics of Scattering by an Atomic Nucleus 944.2 Electron-Electron Scattering 964.3 The Dynamics of Scattering 974.4 Scattering Contrast from Amorphous Specimens 1004.5 Diffraction Contrast from Polycrystalline Specimens 1064.6 Dark-Field Images 1084.7 Electron-Diffraction Patterns 1084.8 Diffraction Contrast within a Single Crystal 1124.9 Phase Contrast in the TEM 1154.10 TEM Specimen Preparation 1195. The Scanning Electron Microscope 1255.1 Operating Principle of the SEM 1255.2 Penetration of Electrons into a Solid 1295.3 Secondary-Electron Images 1315.4 Backscattered-Electron Images 1375.5 Other SEM Imaging Modes 1395.6 SEM Operating Conditions 1435.7 SEM Specimen Preparation 1475.8 The Environmental SEM 1495.9 Electron-Beam Lithography 1516. Analytical Electron Microscopy 1556.1 The Bohr Model of the Atom 1556.2 X-ray Emission Spectroscopy 1586.3 X-Ray Energy-Dispersive Spectroscopy 1616.4 Quantitative Analysis in the TEM 1656.5 Quantitative Analysis in the SEM 1676.6 X-Ray Wavelength-Dispersive Spectroscopy 1686.7 Comparison of XEDS and XWDS Analysis 1696.8 Auger Electron Spectroscopy 1716.9 Electron Energy-Loss Spectroscopy 1727. Recent Developments 1797.1 Scanning Transmission Electron Microscopy 1797.2 Aberration Correction 1827.3 Electron-Beam Monochromators 1847.4 Electron Holography 186Appendix: Mathematical Derivations 191A.1 The Schottky Effect 179A.2 Impact Parameter in Rutherford Scattering 182References 195Index 197

Editorial Reviews

From the reviews:"This book comprises a concise introduction to the fundamental physical concepts of electron microscopy and related analytical techniques . . The concepts are well explained and illustrated, and in addition, the author offers a helpful introduction to microscopy, as a whole . . The text includes interesting historical tidbits and also alludes to more recent developments . . It is suitable for institutional or personal purchase." (Andreas Holzenburg, Microbiology Today, July, 2006)"R.F. Egerton . has now written a short book for beginners on electron microscopy in general: Physical Principles of Electron Microscopy, an Introduction to TEM, SEM, and AEM[10]. . Extremely simple language is used throughout and newcomers to the subject will be grateful for this text, designed to accompany a one-semester undergraduate course." (P. W. Hawkes, Ultramicroscopy, Vol. 107 (54), 2007)