Plasma Etching: An Introduction

Kobo ebook | September 8, 1989

Plasma Etching: An Introduction
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Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
Title:Plasma Etching: An IntroductionFormat:Kobo ebookPublished:September 8, 1989Publisher:Elsevier ScienceLanguage:English

The following ISBNs are associated with this title:

ISBN:9990057628146

Appropriate for ages: All ages

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