Rapid Thermal Processing: Science and Technology

Kobo ebook | December 2, 2012

byRichard B. Fair

not yet rated|write a review
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Pricing and Purchase Info

$62.39 online
$81.00 list price (save 22%)
Available for download
Not available in stores

From the Publisher

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology ...

Format:Kobo ebookPublished:December 2, 2012Publisher:Elsevier ScienceLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0323139809

ISBN - 13:9780323139809

Look for similar items by category:

Customer Reviews of Rapid Thermal Processing: Science and Technology

Reviews