Semiconductor Sensors by Simon M. SzeSemiconductor Sensors by Simon M. Sze

Semiconductor Sensors

EditorSimon M. Sze

Hardcover | October 28, 1994

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
Title:Semiconductor SensorsFormat:HardcoverDimensions:576 pages, 9.63 × 6.38 × 1.25 inPublished:October 28, 1994Publisher:Wiley

The following ISBNs are associated with this title:

ISBN - 10:0471546097

ISBN - 13:9780471546092

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Table of Contents

Classification and Terminology of Sensors (S. Sze).

Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

Acoustic Sensors (M. Motamedi & R. White).

Mechanical Sensors (B. Kloeck & N. de Rooij).

Magnetic Sensors (H. Baltes & R. Castagnetti).

Radiation Sensors (S. Audet & J. Steigerwald).

Thermal Sensors (S. Van Herwaarden & G. Meijer).

Chemical Sensors (S. Morrison).

Biosensors (A. Dewa & W. Ko).

Integrated Sensors (K. Najafi, et al.).



From Our Editors

Semiconductor Sensors provides complete coverage of all important aspects of all modern semiconductor sensing devices. It is the only book that offers detailed coverage of the fabrication, characterization, and operational principles of the entire spectrum of devices made from silicon and other semiconductors; and it is written by world-renowned experts in the sensor field. This authoritative guide combines user-friendly organization for quick reference with a masterful pedagogical design that helps build the reader's understanding from section to section and from one chapter to the next. It begins with a discussion of semiconductor sensor classification and terminology and moves on to a broad description of semiconductor technology, emphasizing bulk and surface micromachining. Senior undergraduate and first-year graduate students will appreciate the 300 illustrations and tables that help to clarify difficult points and encourage visualization of the devices under discussion. They will also benefit from the interdisciplinary nature of the presentation, which encom