Semiconductor Sensors

October 28, 1994|
Semiconductor Sensors by Simon M. Sze
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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.
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Title:Semiconductor SensorsFormat:HardcoverProduct dimensions:576 pages, 9.63 X 6.38 X 1.25 inShipping dimensions:576 pages, 9.63 X 6.38 X 1.25 inPublished:October 28, 1994Publisher:WileyLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0471546097

ISBN - 13:9780471546092

Appropriate for ages: All ages

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