Technology of Integrated Circuits by D. Widmann

Technology of Integrated Circuits

byD. Widmann, H. Mader, H. Friedrich

Paperback | October 21, 2010

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Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
Title:Technology of Integrated CircuitsFormat:PaperbackProduct dimensions:342 pages, 23.5 X 15.5 X 0.02 inShipping dimensions:342 pages, 23.5 X 15.5 X 0.02 inPublished:October 21, 2010Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3642085474

ISBN - 13:9783642085475

Appropriate for ages: All ages

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Table of Contents

1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.