Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers by Denise ReichelTemperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers by Denise Reichel

Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers

byDenise Reichel

Paperback | January 14, 2016

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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.
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Title:Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp AnnealersFormat:PaperbackDimensions:112 pages, 21 × 14.8 × 0.02 inPublished:January 14, 2016Publisher:Springer-Verlag/Sci-Tech/TradeLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:3658113871

ISBN - 13:9783658113872

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Table of Contents

Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing.- Concept of ripple pyrometry during flash lamp annealing.- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.