The Physics of Submicron Lithography

Hardcover | March 31, 1992

byKamil A. Valiev

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This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

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This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.

Format:HardcoverDimensions:504 pages, 10 × 7.01 × 0 inPublished:March 31, 1992Publisher:Springer US

The following ISBNs are associated with this title:

ISBN - 10:0306435780

ISBN - 13:9780306435782

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Table of Contents

Forming Electron Beams of Submicron Cross Section. The Physics of the Interactions Between Fast Electrons and Matter. The Physics of Ion Beam Lithography. The Physics of X-Ray Microlithography. Optical Lithography. Proceedures for Processing Exposed Resist Films and Resist Mask Topography. Index.