Theory and Application of Laser Chemical Vapor Deposition by J. MazumderTheory and Application of Laser Chemical Vapor Deposition by J. Mazumder

Theory and Application of Laser Chemical Vapor Deposition

byJ. Mazumder, Aravinda Kar

Hardcover | October 31, 1995

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In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Title:Theory and Application of Laser Chemical Vapor DepositionFormat:HardcoverDimensions:408 pages, 9.02 × 5.98 × 0 inPublished:October 31, 1995Publisher:Springer US

The following ISBNs are associated with this title:

ISBN - 10:0306449366

ISBN - 13:9780306449369

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Table of Contents

Introduction. Pyrolytic LCVD. Photolytic LCVD. Pyrolytic LCVD Modeling. Photolytic LCVD Modeling. Appendix A: Definitions of Energy Density, Irradiance, and Intensity. Appendix B: Thermal Stress Analysis. Appendix C: Volumetric Absorption Rate. Appendix D: Physical Constants and Conversion Factor. Index.