Thin-Film Deposition: Principles and Practice

byDonald L. Smith

Hardcover | March 22, 1995

Thin-Film Deposition: Principles and Practice by Donald L. Smith
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A text on the basic principles of various thin-film vapor-phase deposition techniques, covering fundamentals and evolving topics including oil-free vacuum, microstructure control, selective CVD, and microanalysis. Discusses selection of techniques for specific applications, and shows how to predict and optimize deposition process behavior and solve production problems, with chapter exercises, a list of symbols and acronyms, and use of SI units. For graduate students in materials science, engineering, and applied physics. Annotation c. by Book News, Inc., Portland, Or.
Title:Thin-Film Deposition: Principles and PracticeFormat:HardcoverProduct dimensions:9.3 X 6.5 X 1.31 inShipping dimensions:9.3 X 6.5 X 1.31 inPublished:March 22, 1995Publisher:McGraw-Hill EducationLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0070585024

ISBN - 13:9780070585027

Appropriate for ages: All ages

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