Thin-film Deposition: Principles And Practice: Principles and Practice

Hardcover | March 22, 1995

byDonald Smith

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A text on the basic principles of various thin-film vapor-phase deposition techniques, covering fundamentals and evolving topics including oil-free vacuum, microstructure control, selective CVD, and microanalysis. Discusses selection of techniques for specific applications, and shows how to predict and optimize deposition process behavior and solve production problems, with chapter exercises, a list of symbols and acronyms, and use of SI units. For graduate students in materials science, engineering, and applied physics. Annotation c. by Book News, Inc., Portland, Or.

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A text on the basic principles of various thin-film vapor-phase deposition techniques, covering fundamentals and evolving topics including oil-free vacuum, microstructure control, selective CVD, and microanalysis. Discusses selection of techniques for specific applications, and shows how to predict and optimize deposition process behav...

Format:HardcoverDimensions:616 pages, 8.8 × 6.1 × 1.62 inPublished:March 22, 1995Publisher:McGraw-Hill Education

The following ISBNs are associated with this title:

ISBN - 10:0070585024

ISBN - 13:9780070585027

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Table of Contents

Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.