Thin Film Processes

Kobo ebook | December 1, 2012

byVossen, John L.

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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.

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From the Publisher

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to prov...

Format:Kobo ebookPublished:December 1, 2012Publisher:Academic PressLanguage:English

The following ISBNs are associated with this title:

ISBN - 10:0323138985

ISBN - 13:9780323138987

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